The 37-year-old actor and Charlotte, 32, who have been together since 2009, somehow managed to keep their French nuptials a secret until now.
According to reports the wedding took place at the Chateau de Roussan, an 18th century castle, and only a small group of family and friends attended.
Tom's six-year-old son Louis, from his previous relationship with Rachel Speed, was also in attendance.
A source told The Sun: "It was a beautiful, low-key day made even more special because they just had their closet friends and family around them.
"Tom's son Louis played a key role during the ceremony. And they made certain to pick a stunning and private setting.
"There was nothing flash about the wedding, they always said they wanted it to be about the two of them and their family rather than any grand gesture."
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This is Tom's second marriage, after he split from first wife Sarah Ward in 2004 after five years.
Tom has spoken out before about the breakdown of his first marriage, blaming his former drug addiction.
Speaking previously about their wedding plans, actress Charlotte said: "We are desperate to do it, but I'll never have a celebrity wedding. It will be low-key, with family and friends."